- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/09 - Diaphragms; Shields associated with electron- or ion-optical arrangements; Compensation of disturbing fields
Patent holdings for IPC class H01J 37/09
Total number of patents in this class: 427
10-year publication summary
|
26
|
23
|
32
|
32
|
34
|
40
|
39
|
46
|
41
|
11
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 6816 |
52 |
| Hitachi High-Tech Corporation | 4424 |
41 |
| Hitachi High-Technologies Corporation | 2034 |
38 |
| NuFlare Technology, Inc. | 770 |
31 |
| Carl Zeiss Microscopy GmbH | 1146 |
19 |
| Applied Materials Israel, Ltd. | 549 |
18 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 149 |
15 |
| Carl Zeiss MultiSEM GmbH | 85 |
15 |
| FEI Company | 851 |
11 |
| Axcelis Technologies, Inc. | 429 |
10 |
| Hitachi High-Tech Science Corporation | 326 |
9 |
| Applied Materials, Inc. | 16587 |
9 |
| JEOL Ltd. | 556 |
8 |
| Mapper Lithography IP B.V. | 136 |
8 |
| Hitachi, Ltd. | 16452 |
7 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
7 |
| Carl Zeiss SMT GmbH | 2646 |
7 |
| KLA Corporation | 1223 |
7 |
| IMS Nanofabrication GmbH | 56 |
5 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
4 |
| Other owners | 106 |